"MEMS-based force sensor: Design and applications."

Daniel López et al. (2005)

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DOI: 10.1002/BLTJ.20104

access: closed

type: Journal Article

metadata version: 2020-02-27

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Daniel López, Ricardo S. Decca, Ephraim Fischbach, Dennis E. Krause:
MEMS-based force sensor: Design and applications. Bell Labs Tech. J. 10(3): 61-80 (2005)

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