"Device photolithography: An overview of the new mask-making system."

F. L. Howland, K. M. Poole (1970)

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DOI: 10.1002/J.1538-7305.1970.TB02507.X

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type: Journal Article

metadata version: 2020-03-03

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F. L. Howland, K. M. Poole:
Device photolithography: An overview of the new mask-making system. Bell Syst. Tech. J. 49(9): 1997-2009 (1970)

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