"Automation of Etching-Pattern Layout."

Itaru Aramaki, Tomokazu Kawabata, Kazuhiko Arimoto (1971)

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DOI: 10.1145/362854.362886

access: closed

type: Journal Article

metadata version: 2018-11-06

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Itaru Aramaki, Tomokazu Kawabata, Kazuhiko Arimoto:
Automation of Etching-Pattern Layout. Commun. ACM 14(11): 720-730 (1971)

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