"Finite element analysis and optimization of temperature field in GaN-MOCVD ..."

Jincheng Zhang et al. (2010)

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DOI: 10.1007/S11432-010-4067-9

access: closed

type: Journal Article

metadata version: 2025-05-05

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Jincheng Zhang, Zhiming Li, Yue Hao, Hao Wang, Peixian Li:
Finite element analysis and optimization of temperature field in GaN-MOCVD reactor. Sci. China Inf. Sci. 53(10): 2138-2143 (2010)

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