"High-fidelity rapid prototyping of 300 mm fabs through discrete event ..."

Jonghun Park et al. (2001)

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DOI: 10.1016/S0166-3615(01)00082-3

access: closed

type: Journal Article

metadata version: 2023-01-10

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Jonghun Park, Spyros A. Reveliotis, Douglas A. Bodner, Chen Zhou, Jennfong Wu, Leon F. McGinnis:
High-fidelity rapid prototyping of 300 mm fabs through discrete event system modeling. Comput. Ind. 45(1): 79-98 (2001)

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