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"A parallel algorithm for robust fault detection in semiconductor ..."

Woong-Kee Loh, Ju Young Yun (2014)

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DOI: 10.1007/S10586-014-0366-Z

access: closed

type: Journal Article

metadata version: 2020-09-29

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Woong-Kee Loh, Ju Young Yun:
A parallel algorithm for robust fault detection in semiconductor manufacturing processes. Clust. Comput. 17(3): 643-651 (2014)

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