"Tracking control of a biaxial piezo-actuated positioning stage using ..."

Chih-Jer Lin, Po-Ting Lin (2012)

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DOI: 10.1016/J.CAMWA.2011.12.015

access: open

type: Journal Article

metadata version: 2021-02-11

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Chih-Jer Lin, Po-Ting Lin:
Tracking control of a biaxial piezo-actuated positioning stage using generalized Duhem model. Comput. Math. Appl. 64(5): 766-787 (2012)

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