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"Silicon on Nothing Mems Electromechanical Resonator"
Cedric Durand et al. (2008)
- Cedric Durand, Fabrice Casset, Pascal Ancey, Fabienne Judong, Alexandre Talbot, Reni Quenouillere, Denis Renaud, Stephan Borel, Brigitte Florin, Lionel Buchaillot:
Silicon on Nothing Mems Electromechanical Resonator. CoRR abs/0802.3051 (2008)
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