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"Fabrication of 3D Packaging TSV using DRIE"

Mathieu Puech et al. (2008)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2023-11-09

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0805-0919
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-0805-0919
Mathieu Puech, Jean-Marc Thevenoud, J. M. Gruffat, N. Launay, N. Arnal, P. Godinat:
Fabrication of 3D Packaging TSV using DRIE. CoRR abs/0805.0919 (2008)

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