"Machine learning and atomic layer deposition: predicting saturation times ..."

Angel Yanguas-Gil, Jeffrey W. Elam (2022)

> Home

Details and statistics

DOI: 10.48550/ARXIV.2205.08378

access: open

type: Informal or Other Publication

metadata version: 2022-05-23

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/corr/abs-2205-08378
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-2205-08378
Angel Yanguas-Gil, Jeffrey W. Elam:
Machine learning and atomic layer deposition: predicting saturation times from reactor growth profiles using artificial neural networks. CoRR abs/2205.08378 (2022)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.