"Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review."

Tao Han, Zahra Taheri, Hyunwoong Ko (2025)

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DOI: 10.48550/ARXIV.2507.10983

access: open

type: Informal or Other Publication

metadata version: 2025-08-14

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  - journals/corr/abs-2507-10983
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  - https://dblp.org/rec/journals/corr/abs-2507-10983
Tao Han, Zahra Taheri, Hyunwoong Ko:
Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review. CoRR abs/2507.10983 (2025)

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