"Predictive process simulation and stress-mediated diffusion in silicon."

Wolfgang Windl et al. (2001)

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DOI: 10.1109/5992.931909

access: closed

type: Journal Article

metadata version: 2022-08-16

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Wolfgang Windl, Matthew Laudon, Neil N. Carlson, Murray S. Daw:
Predictive process simulation and stress-mediated diffusion in silicon. Comput. Sci. Eng. 3(4): 92-95 (2001)

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