"Design and optimization of an integrated MEMS gas chamber with high ..."

Jing Yang et al. (2021)

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DOI: 10.1016/J.DCAN.2020.05.006

access: open

type: Journal Article

metadata version: 2022-07-07

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Jing Yang, Yuhua Cheng, Yupeng Yuan, Xiaofei Li, Zuwei Zhang, Ming Xu, Dengpan Wang, Jiangdong Mu, Yong Mei, Yuzhe Zhang:
Design and optimization of an integrated MEMS gas chamber with high transmissivity. Digit. Commun. Networks 7(1): 82-91 (2021)

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