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"Comprehensive Static Characterization of Vertical Electrostatically ..."

Edward K. Chan, Krishna Garikipati, Robert W. Dutton (1999)

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DOI: 10.1109/54.808212

access: closed

type: Journal Article

metadata version: 2020-05-17

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  - https://dblp.org/rec/journals/dt/ChanGD99
Edward K. Chan, Krishna Garikipati, Robert W. Dutton:
Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams. IEEE Des. Test Comput. 16(4): 58-65 (1999)

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