"Generative adversarial network-based prediction of microhole profile ..."

Hyunmin Park et al. (2025)

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DOI: 10.1016/J.ENGAPPAI.2025.111763

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type: Journal Article

metadata version: 2025-09-06

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Hyunmin Park, Jun Goo Kang, Jin Seok Kim, Eun Goo Kang, Seung-Kyum Choi, Hyung Wook Park:
Generative adversarial network-based prediction of microhole profile drilled with high-energy electron beam on silicon wafer. Eng. Appl. Artif. Intell. 159: 111763 (2025)

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