"Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy ..."

Chunxia Jiang et al. (2020)

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DOI: 10.3390/E22020234

access: open

type: Journal Article

metadata version: 2020-12-25

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Chunxia Jiang, Rongbin Li, Xin Wang, Hailong Shang, Yong Zhang, Peter K. Liaw:
Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System. Entropy 22(2): 234 (2020)

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