"Exponentially weighted moving average-based procedure with adaptive ..."

Young-Seon Jeong, Byungwhan Kim, Young-Don Ko (2013)

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DOI: 10.1016/J.ESWA.2013.04.016

access: closed

type: Journal Article

metadata version: 2024-03-25

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Young-Seon Jeong, Byungwhan Kim, Young-Don Ko:
Exponentially weighted moving average-based procedure with adaptive thresholding for monitoring nonlinear profiles: Monitoring of plasma etch process in semiconductor manufacturing. Expert Syst. Appl. 40(14): 5688-5693 (2013)

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