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"Neural network modeling of inter-characteristics of silicon nitride film ..."

Su Jin Lee, Byungwhan Kim, Sung Wook Baik (2011)

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DOI: 10.1016/J.ESWA.2011.03.016

access: closed

type: Journal Article

metadata version: 2018-11-30

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Su Jin Lee, Byungwhan Kim, Sung Wook Baik:
Neural network modeling of inter-characteristics of silicon nitride film deposited by using a plasma-enhanced chemical vapor deposition. Expert Syst. Appl. 38(9): 11437-11441 (2011)

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