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"Simulation of silicon semiconductor processing."

Peter Pichler, Heiner Ryssel (1990)

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DOI: 10.1002/ETT.4460010310

access: closed

type: Journal Article

metadata version: 2020-05-18

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Peter Pichler, Heiner Ryssel:
Simulation of silicon semiconductor processing. Eur. Trans. Telecommun. 1(3): 293-299 (1990)

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