"Thin-film-transistor process-characterization test structures."

Evan G. Colgan et al. (1998)

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DOI: 10.1147/RD.423.0481

access: closed

type: Journal Article

metadata version: 2020-03-13

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Evan G. Colgan, Robert J. Polastre, Masatomo Takeichi, Robert L. Wisnieff:
Thin-film-transistor process-characterization test structures. IBM J. Res. Dev. 42(3): 481-490 (1998)

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