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"Two-level BEOL processing for rapid iteration in MRAM development."
Michael C. Gaidis et al. (2006)
- Michael C. Gaidis, Eugene J. O'Sullivan, Janusz Jozef Nowak, Yu Lu, Sivananda K. Kanakasabapathy, Philip Louis Trouilloud, Daniel Christopher Worledge, Solomon Assefa, Keith R. Milkove, George P. Wright, William J. Gallagher:
Two-level BEOL processing for rapid iteration in MRAM development. IBM J. Res. Dev. 50(1): 41-54 (2006)
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