"Electrochemical microfabrication by laser-enhanced photothermal processes."

Robert J. von Gutfeld, Keith G. Sheppard (1998)

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DOI: 10.1147/RD.425.0639

access: closed

type: Journal Article

metadata version: 2020-03-13

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Robert J. von Gutfeld, Keith G. Sheppard:
Electrochemical microfabrication by laser-enhanced photothermal processes. IBM J. Res. Dev. 42(5): 639-654 (1998)

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