"Single-Step Optical Lift-Off Process."

M. Hatzakis, B. J. Canavello, Jane M. Shaw (1980)

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DOI: 10.1147/RD.244.0452

access: closed

type: Journal Article

metadata version: 2020-05-12

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M. Hatzakis, B. J. Canavello, Jane M. Shaw:
Single-Step Optical Lift-Off Process. IBM J. Res. Dev. 24(4): 452-460 (1980)

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