"Plasma-assisted oxidation, anodization, and nitridation of silicon."

Dennis W. Hess (1999)

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DOI: 10.1147/RD.431.0127

access: closed

type: Journal Article

metadata version: 2020-03-13

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Dennis W. Hess:
Plasma-assisted oxidation, anodization, and nitridation of silicon. IBM J. Res. Dev. 43(1): 127-146 (1999)

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