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"Fabrication of suspended metallic structures: application to a one-shot ..."
Alexis Debray et al. (2007)
- Alexis Debray, Kazuyuki Ueda, Masaaki Shibata, Hiroyuki Fujita:
Fabrication of suspended metallic structures: application to a one-shot micro-valve. IEICE Electron. Express 4(14): 455-460 (2007)
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