"Development of high-yield fabrication technique for MEMS-PhC devices."

Akio Higo et al. (2006)

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DOI: 10.1587/ELEX.3.39

access: open

type: Journal Article

metadata version: 2025-08-05

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  - https://dblp.org/rec/journals/ieiceee/HigoIIATGYFT06
Akio Higo, Satoshi Iwamoto, Satomi Ishida, Yasuhiko Arakawa, Masatoshi Tokushima, Akiko Gomyo, Hirohito Yamada, Hiroyuki Fujita, Hiroshi Toshiyoshi:
Development of high-yield fabrication technique for MEMS-PhC devices. IEICE Electron. Express 3(3): 39-43 (2006)

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