"Contact resistivity reduction for PtSi/Si(100) by dopant segregation process."

Shun'ichiro Ohmi, Jun Arima (2013)

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DOI: 10.1587/ELEX.10.20130778

access: open

type: Journal Article

metadata version: 2021-02-12

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  - https://dblp.org/rec/journals/ieiceee/OhmiA13
Shun'ichiro Ohmi, Jun Arima:
Contact resistivity reduction for PtSi/Si(100) by dopant segregation process. IEICE Electron. Express 10(24): 20130778 (2013)

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