"Interaction of Bis-diethylaminosilane with a Hydroxylized Si (001) ..."

Seung-Bin Baek, Dae-Hee Kim, Yeong-Cheol Kim (2011)

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DOI: 10.1587/TRANSELE.E94.C.771

access: closed

type: Journal Article

metadata version: 2020-04-11

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Seung-Bin Baek, Dae-Hee Kim, Yeong-Cheol Kim:
Interaction of Bis-diethylaminosilane with a Hydroxylized Si (001) Surface for SiO₂ Thin-Film Growth Using Density Functional Theory. IEICE Trans. Electron. 94-C(5): 771-774 (2011)

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