"Relationship of Channel and Surface Orientation to Mechanical and ..."

Wen-Teng Chang et al. (2019)

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DOI: 10.1587/TRANSELE.2018FUP0006

access: closed

type: Journal Article

metadata version: 2025-03-03

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Wen-Teng Chang, Shih-Wei Lin, Min-Cheng Chen, Wen-Kuan Yeh:
Relationship of Channel and Surface Orientation to Mechanical and Electrical Stresses on N-Type FinFETs. IEICE Trans. Electron. 102-C(6): 429-434 (2019)

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