"Strain Effects in van der Pauw (VDP) Stress Sensor Fabricated on (111) ..."

Chun-Hyung Cho, Ginkyu Choi, Ho-Young Cha (2010)

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DOI: 10.1587/TRANSELE.E93.C.640

access: closed

type: Journal Article

metadata version: 2020-04-11

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Chun-Hyung Cho, Ginkyu Choi, Ho-Young Cha:
Strain Effects in van der Pauw (VDP) Stress Sensor Fabricated on (111) Silicon. IEICE Trans. Electron. 93-C(5): 640-643 (2010)

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