"Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of ..."

A-Ram Choi et al. (2008)

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DOI: 10.1093/IETELE/E91-C.5.767

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type: Journal Article

metadata version: 2020-04-11

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A-Ram Choi, Sang-Sik Choi, Byung-Guan Park, Dongwoo Suh, Gyungock Kim, Jin-Tae Kim, Jin-Soo Choi, Deok Ho Cho, Tae-Hyun Han, Kyu-Hwan Shim:
Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films. IEICE Trans. Electron. 91-C(5): 767-771 (2008)

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