"Scalability of Vertical MOSFETs in Sub-10 nm Generation and Its Mechanism."

Tetsuo Endoh, Yuto Norifusa (2009)

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DOI: 10.1587/TRANSELE.E92.C.594

access: closed

type: Journal Article

metadata version: 2020-04-11

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Tetsuo Endoh, Yuto Norifusa:
Scalability of Vertical MOSFETs in Sub-10 nm Generation and Its Mechanism. IEICE Trans. Electron. 92-C(5): 594-597 (2009)

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