"In-line Process Monitoring for Amorphous Oxide Semiconductor TFT ..."

Hiroshi Goto et al. (2014)

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DOI: 10.1587/TRANSELE.E97.C.1055

access: closed

type: Journal Article

metadata version: 2020-04-11

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  - https://dblp.org/rec/journals/ieicet/GotoTMTHKOHK14
Hiroshi Goto, Hiroaki Tao, Shinya Morita, Yasuyuki Takanashi, Aya Hino, Tomoya Kishi, Mototaka Ochi, Kazushi Hayashi, Toshihiro Kugimiya:
In-line Process Monitoring for Amorphous Oxide Semiconductor TFT Fabrication using Microwave-detected Photoconductivity Decay Technique. IEICE Trans. Electron. 97-C(11): 1055-1062 (2014)

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