"Room-Temperature Gold-Gold Bonding Method Based on Argon and Hydrogen Gas ..."

Eiji Higurashi et al. (2016)

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DOI: 10.1587/TRANSELE.E99.C.339

access: closed

type: Journal Article

metadata version: 2022-10-02

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Eiji Higurashi, Michitaka Yamamoto, Takeshi Sato, Tadatomo Suga, Renshi Sawada:
Room-Temperature Gold-Gold Bonding Method Based on Argon and Hydrogen Gas Mixture Atmospheric-Pressure Plasma Treatment for Optoelectronic Device Integration. IEICE Trans. Electron. 99-C(3): 339-345 (2016)

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