"Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide ..."

Takuji Ikemoto, Yasuo Kokubun (2007)

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DOI: 10.1093/IETELE/E90-C.1.78

access: closed

type: Journal Article

metadata version: 2020-04-11

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Takuji Ikemoto, Yasuo Kokubun:
Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics. IEICE Trans. Electron. 90-C(1): 78-86 (2007)

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