"LSI Design Flow for Shot Reduction of Character Projection Electron Beam ..."

Taisuke Kazama, Makoto Ikeda, Kunihiro Asada (2006)

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DOI: 10.1093/IETFEC/E89-A.12.3546

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type: Journal Article

metadata version: 2020-04-11

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Taisuke Kazama, Makoto Ikeda, Kunihiro Asada:
LSI Design Flow for Shot Reduction of Character Projection Electron Beam Direct Writing Using Combined Cell Stencil. IEICE Trans. Fundam. Electron. Commun. Comput. Sci. 89-A(12): 3546-3550 (2006)

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