"An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep ..."

Zhen Ma et al. (2007)

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DOI: 10.1093/IETELE/E90-C.12.2192

access: closed

type: Journal Article

metadata version: 2020-04-11

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Zhen Ma, David M. Klymyshyn, Sven Achenbach, Martin Börner, Nina Dambrowsky, Jürgen Mohr:
An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography. IEICE Trans. Electron. 90-C(12): 2192-2197 (2007)

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