"Low Temperature Formation of Pd2Si with TiN Encapsulating Layer ..."

Rengie Mark D. Mailig, Shun'ichiro Ohmi (2019)

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DOI: 10.1587/TRANSELE.2018FUP0001

access: closed

type: Journal Article

metadata version: 2021-01-18

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Rengie Mark D. Mailig, Shun'ichiro Ohmi:
Low Temperature Formation of Pd₂Si with TiN Encapsulating Layer and Its Application to Dopant Segregation Process. IEICE Trans. Electron. 102-C(6): 447-452 (2019)

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