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"Gate-Last MISFET Structures and Process for Characterization of High-k and ..."
Takeo Matsuki et al. (2005)
- Takeo Matsuki, Kazuyoshi Torii, Takeshi Maeda, Yasushi Akasaka, Kiyoshi Hayashi, Naoki Kasai, Tsunetoshi Arikado:
Gate-Last MISFET Structures and Process for Characterization of High-k and Metal Gate MISFETs. IEICE Trans. Electron. 88-C(5): 804-810 (2005)
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