"Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ ..."

Shuichi Nagasawa et al. (2014)

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DOI: 10.1587/TRANSELE.E97.C.132

access: closed

type: Journal Article

metadata version: 2020-12-29

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Shuichi Nagasawa, Kenji Hinode, Tetsuro Satoh, Mutsuo Hidaka, Hiroyuki Akaike, Akira Fujimaki, Nobuyuki Yoshikawa, Kazuyoshi Takagi, Naofumi Takagi:
Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation. IEICE Trans. Electron. 97-C(3): 132-140 (2014)

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