"Etching Control of HfN Encapsulating Layer for PtHf-Silicide Formation ..."

Shun'ichiro Ohmi, Yuya Tsukamoto, Rengie Mark D. Mailig (2019)

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DOI: 10.1587/TRANSELE.2018FUP0003

access: closed

type: Journal Article

metadata version: 2021-01-18

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Shun'ichiro Ohmi, Yuya Tsukamoto, Rengie Mark D. Mailig:
Etching Control of HfN Encapsulating Layer for PtHf-Silicide Formation with Dopant Segregation Process. IEICE Trans. Electron. 102-C(6): 453-457 (2019)

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