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"PdEr-Silicide Formation and Contact Resistivity Reduction to n-Si(100) ..."
Shun'ichiro Ohmi et al. (2018)
- Shun'ichiro Ohmi, Yuya Tsukamoto, Weiguang Zuo, Yasushi Masahiro:
PdEr-Silicide Formation and Contact Resistivity Reduction to n-Si(100) Realized by Dopant Segregation Process. IEICE Trans. Electron. 101-C(5): 311-316 (2018)
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