"Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by ..."

P. Pungboon Pansila et al. (2015)

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DOI: 10.1587/TRANSELE.E98.C.382

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type: Journal Article

metadata version: 2020-04-11

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P. Pungboon Pansila, Kensaku Kanomata, Bashir Ahmmad, Shigeru Kubota, Fumihiko Hirose:
Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy. IEICE Trans. Electron. 98-C(5): 382-389 (2015)

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