"Tunable Vertical Comb for Driving Micromirror Realized by Bending Device ..."

Minoru Sasaki et al. (2007)

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DOI: 10.1093/IETELE/E90-C.1.147

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type: Journal Article

metadata version: 2020-04-11

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Minoru Sasaki, Masahiro Ishimori, JongHyeong Song, Kazuhiro Hane:
Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer. IEICE Trans. Electron. 90-C(1): 147-148 (2007)

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