"High UV Sensitivity of SiON Film and Its Application to Center Wavelength ..."

Satoshi Ueno, Toshiki Naganawa, Yasuo Kokubun (2005)

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DOI: 10.1093/IETELE/E88-C.5.998

access: closed

type: Journal Article

metadata version: 2020-04-11

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Satoshi Ueno, Toshiki Naganawa, Yasuo Kokubun:
High UV Sensitivity of SiON Film and Its Application to Center Wavelength Trimming of Microring Resonator Filter. IEICE Trans. Electron. 88-C(5): 998-1004 (2005)

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