"Exhaustive and Systematic Accuracy Verification and Enhancement of STI ..."

Kenta Yamada et al. (2010)

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DOI: 10.1587/TRANSELE.E93.C.1349

access: closed

type: Journal Article

metadata version: 2020-04-11

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Kenta Yamada, Toshiyuki Syo, Hisao Yoshimura, Masaru Ito, Tatsuya Kunikiyo, Toshiki Kanamoto, Shigetaka Kumashiro:
Exhaustive and Systematic Accuracy Verification and Enhancement of STI Stress Compact Model for General Realistic Layout Patterns. IEICE Trans. Electron. 93-C(8): 1349-1358 (2010)

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