"A Process Optimization Method of the Mini-LOCOS Field Plate Profile for ..."

Shaoxin Yu et al. (2023)

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DOI: 10.1049/2023/5298361

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type: Journal Article

metadata version: 2024-12-22

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Shaoxin Yu, Wei-Heng Shao, Pei-Xiong Gao, Xiang Li, Rongsheng Chen, Bin Zhao:
A Process Optimization Method of the Mini-LOCOS Field Plate Profile for Improving Electrical Characteristics of LDMOS Device. IET Circuits Devices Syst. 2023: 1-9 (2023)

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