"Non-Contact Guideway for Substrate Transportation by Ultrasonic Oscillation."

Hiromi Isobe, Akira Kyusojin (2008)

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DOI: 10.20965/IJAT.2008.P0199

access: closed

type: Journal Article

metadata version: 2020-07-09

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Hiromi Isobe, Akira Kyusojin:
Non-Contact Guideway for Substrate Transportation by Ultrasonic Oscillation. Int. J. Autom. Technol. 2(3): 199-204 (2008)

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