"Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation ..."

Lue Quan et al. (2022)

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DOI: 10.20965/IJAT.2022.P0572

access: closed

type: Journal Article

metadata version: 2024-07-03

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Lue Quan, Yuki Shimizu, Ryo Sato, Dong Wook Shin, Hiraku Matsukuma, Andreas Archenti, Wei Gao:
Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction. Int. J. Autom. Technol. 16(5): 572-581 (2022)

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