"Real-Time Interfacial Pressure Prediction in CMP Using Machine Learning ..."

Tom Rothe et al. (2025)

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DOI: 10.20965/IJAT.2025.P0879

access: closed

type: Journal Article

metadata version: 2025-10-06

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Tom Rothe, Andre Lauff, Alexey Shaporin, Peter Thieme, Mudassir Ali Sayyed, Knut Gottfried, Jörg Schuster, Jan Langer, Linda Jäckel, Martin Stoll, Harald Kuhn:
Real-Time Interfacial Pressure Prediction in CMP Using Machine Learning Surrogates of Finite Element Simulations. Int. J. Autom. Technol. 19(5): 879-889 (2025)

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